Study of the Growth of Magnesium Oxide Thin Films Using X-Ray Diffraction Technique: Mini Review-Juniper Publishers
Juniper Publishers
Abstract
X-ray diffraction method has been used by many
researchers in order to study the structure of films. In this work,
amorphous structure or polycrystalline magnesium oxide thin films could
be identified using this technique. Furthermore, the grain sizes could
be measured using X-ray diffraction data as well.
Keywords: Magnesium oxide, Thin films, Semiconductor, Deposition, Grain sizeIntroduction
Oxide materials [1-12] and metal chalcogenide thin
films [13-21] are widely employed in the producing of solar cells,
sensor devices, laser devices, optoelectronics devices, integrated
circuits, and microelectronics. There are many groups of scientists from
different countries involved to study these materials [22-29].
In this work, magnesium oxide (MgO) films were
prepared using various deposition techniques. Magnesium oxide was chosen
due to it has a high melting temperature, stable at atmospheric and
large yield of secondary electrons during the bombardment by ions. The
obtained films will be investigated using X-ray diffraction technique.
Literature Survey
X-ray diffraction (XRD) technique is mostly
employed in materials sciences for the measurement of compounds. Many
scientists point out some advantages of XRD such as it gives qualitative
and quantitative of crystalline compounds [30-36].
Metal organic chemical vapor deposition (MOCVD)
method has been used to prepare MgO films as described by Boo et al.
[37]. The XRD patterns confirm that the obtained films with high
crystalline and a preferred (111) plane on both Si (100) and c-plane
sapphire substrates. Similar growth texture was also detected when the
films were synthesized using RF ion plating method as proposed by
Kenichi et al. [38]. Manin et al. [39] produced MgO films using MOCVD
method. The obtained experimental results support that the oxygen low
rate and temperature of the substrate were considered to be the most
critical in order to determine the structure of samples. Dyachenko et
al. [40] have reported that MgO films were deposited onto glass
substrate using spray pyrolysis method under various substrate
temperatures. The XRD data confirm that the quality of MgO film’s
textures increases with increasing the substrate temperature from 370 °C
to 420 °C. In other case, (200) preferential orientation was observed
for the films prepared at 800 °C using sol-gel method as concluded by Ho
et al. [41]. Chemical vapor deposition method was used to prepare MgO
films as reported by Toshiro et al. [42]. They found that highly (100)
orientation can be seen in XRD patterns for the films prepared at a
reaction temperature above 450 °C.
XRD technique has been used by Kurtaran et al. [43]
in order to investigate the structure of sprayed MgO films. They claim
that amorphous structure and polycrystalline nature could be seen for
as-deposited films and annealed samples, respectively. On the other
hand, Mahadeva et al. [44] discussed the XRD patterns for the MgO films
prepared under various oxygen partial pressures in the working gas. They
found that the films are mostly amorphous in the as-deposited
conditions. However, the MgO peaks are more significantly appear in the
films deposited in oxygen partial pressure of 10 % and annealed films.
The
grain size could be determined using XRD data. MgO films were prepared
using spray pyrolysis at various temperatures (425-525 °C).The grain
size indicates a slight
increase as the temperature increased as pointed out by Faraq
et al. [45]. On the other hand, MgO films were synthesized using
spray pyrolysis method by Nisatharaju et al. [46]. The average
grain size was calculated and was in the order of nanometer
(14nm).
Conclusion
X-ray diffraction analysis was employed as the
characterization tool for optimizing the magnesium oxide
films growth conditions. The crystalline structure, amorphous
and grain size could be determined using this tool.
Acknowledgement
INTI INTERNATIONAL UNIVERSITY is gratefully
acknowledged for the financial support of this work.
Conflict of Interest
Author has declared that no competing interests exist.
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